1. Manipulater Heater Rebuilds

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Semiconductor Engineering Products LLC can rebuild most GEN 2000 Manipulator Heaters.

Option 1- Complete manipulator heater
The rebuild includes the Mo heater base, the central heater assembly rod assembly, the PBN heater sandwiches and Ta wire. Heaters are shipped with the Ta wire wound into position in the PBN sandwiches, passed thru the central heater assembly rod assembly and terminated (for easy installation in your tool) on the underside of the Mo base.

Option 2 - PBN heater sandwich assembly only
The rebuild includes new PBN heater sandwiches and Ta wire. Heaters are shipped with the Ta wire would into position in the PBN sandwiches, passed thru the central heater assembly rod assembly and terminated (for easy installation in your tool) on the underside of the Mo base.

Option 3 - Rewiring of the PBN sandwiches only
Includes the Ta wire wound into position in the customers PBN sandwich with sufficient wire protruding to wire through the customers Ta tubes.

IMPORTANT: The customers PBN sandwich must be in good condition to accept our wiring. Damaged PBN sandwiches may lead to malfunction of the heater. We will notify customers on receipt of a damaged PBN sandwich so that they can decide how to continue.