MBE Veeco GEN 2000/GENII Parts

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Conical, Sumo, K Cell & Effusion Rebuilds

SEP LLC engineers have rebuilt over sixty MBE cells to date and some of the biggest US tool users use our services. We deliver quality, timely rebuilds and are considerably less expensive than the services provided by the OEM.
We rebuild most types of Ta wire and Ta flat filament Sumo, Conical,  effusion and K cells for (and not exclusive to) the following tools:
 
VG (Riber), V80, V90, V100
Riber R49, R6000
Veeco GEN 2, GEN 2000

Varian Tools
 
On reciept of your cleaned cell, SEP LLC will strip down the cell, confirm with you the work that needs to be done and ship rebuilt the cell back rebuilt.  We also offer optional improvements to you cell including tip and base back up thermocouples that allows the user to switch to the back ups in the event of a thermocouple failure - often without having to remove the cell from the tool. 

 

An optional outgas/performance report can be included with you cell. 

Manipulater Heater Rebuilds

Semiconductor Engineering Products LLC can rebuild most GEN 2000 Manipulator Heaters.

Option 1- Complete manipulator heater
The rebuild includes the Mo heater base, the central heater assembly rod assembly, the PBN heater sandwiches and Ta wire. Heaters are shipped with the Ta wire wound into position in the PBN sandwiches, passed thru the central heater assembly rod assembly and terminated (for easy installation in your tool) on the underside of the Mo base.

Option 2 - PBN heater sandwich assembly only
The rebuild includes new PBN heater sandwiches and Ta wire. Heaters are shipped with the Ta wire would into position in the PBN sandwiches, passed thru the central heater assembly rod assembly and terminated (for easy installation in your tool) on the underside of the Mo base.

Option 3 - Rewiring of the PBN sandwiches only
Includes the Ta wire wound into position in the customers PBN sandwich with sufficient wire protruding to wire through the customers Ta tubes.

IMPORTANT: The customers PBN sandwich must be in good condition to accept our wiring. Damaged PBN sandwiches may lead to malfunction of the heater. We will notify customers on receipt of a damaged PBN sandwich so that they can decide how to continue.