Semiconductor Engineering Products, LLC, offers the following filters for use with the Aixtron 2400, 2600 and 2800 series MOCVD tools: 
SEP part # SEP-50262 - OEM part# 10001784 (40050262)
SEP part # AIX-10-50908 - OEM part # 100032934 (40050908)
SEP part # AIX-10-01859 - OEM part # 100001859 (40051522)